Friend of mine worked for an asml supplier. He was working on adjusting the optical path based on how the laser going through a lens heats that lens up and changes its optical qualities. There are so many challenges we don't even think about
Building a modern semiconductor factory starts long before you can begin to think about the foundation. Minimizing vibration is included in thinking about the siting, seismic insulation of the building and the placement of just about everything in the fab itself.
Think 'boxes in boxes' to get maximum insulation. I also have a friend who works in this industry and he once joked that they have an almanac built in to deal with moon tides and while it is a funny joke you have to wonder if there isn't going to be a time when even that sort of effect will have to be accounted for. Amazing stuff.
ASML is one of a short list of Dutch companies that I'm super proud of, they keep on innovating no matter how extreme the challenges are. The moat they have is incredibly deep.
When you go to the extremes those tiny details suddenly aren't tiny details anymore. As a semi-random example, a significant source of noise in LIGO, the gravitational wave detectors, is the push of photons striking the 40kg mirrors[1][2].
